Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bc8aefc289a8d59f22ef88e19b3c1a8 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K2003-2237 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K9-04 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-20 |
filingDate |
2006-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74dc401f23154e70b2caceb0acf5211c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b533e1ae0b7b2781291b51197f458f68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e30cf9bab08d0c5ca72bfed0659ec9cb |
publicationDate |
2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20080058503-A |
titleOfInvention |
Silsesquioxane-Titania Interpolymers |
abstract |
The present invention relates to silsesquioxane-titania interpolymers having a titania domain size of less than about 5 nanometers. Such polymers are useful for forming antireflective coatings, for example in the manufacture of microelectronic devices. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150127813-A |
priorityDate |
2005-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |