Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate |
2006-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0404f734ae876eb23bfedabca2abc0c7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_368f3adf309874820f1cd2166e6641b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3459cb5cc8b4d592db3bdd04ae5cf7d2 |
publicationDate |
2008-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20080054443-A |
titleOfInvention |
Spray Resistant Photoresist Compositions and Laminates |
abstract |
The photoresist film 2 is spray-coated by using a photoresist composition containing a modified siloxane-based surfactant on a substrate on which an end 1 having a step H of 10 to 1000 µm is formed on a surface to be coated. To form. The upper surface 1a and the side surface 1b of the end part 1 are continuously covered with the photoresist film 2, and the film thickness in the upper end surface 1a of the photoresist film 2 is 1-40 micrometers. In addition, the laminated body whose film thickness in the boundary part of the upper surface 1a and the side surface 1b of an edge part is 75% or more of the film thickness in the upper surface 1a adjacent to the boundary part is obtained. |
priorityDate |
2005-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |