http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080052423-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2007-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_811c9e6e856f6d34daba788e2d6e8199 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a9aacf507db12b95a8f92ddad3e63f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830b8c370f2092414da814524918af24 |
| publicationDate | 2008-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080052423-A |
| titleOfInvention | Chemically amplified resist composition |
| abstract | The present invention includes a structural unit having a salt of formula (A), a salt of formula (B), and an acid-labile group, and is itself insoluble in an aqueous alkali solution or insoluble in an aqueous alkali solution by the action of an acid. Provided is a chemically amplified resist composition comprising a resin (C) that becomes soluble.n n n Formula 1n n n n n n n n Formula 2n n n n n n n n In Chemical Formulas 1 and 2 above,n n n R 21 is a C1-C30 hydrocarbon group, represents a C1-C30 hydrocarbon group, or the like,n n n Q 1 and Q 2 each independently represent a fluorine atom and the like,n n n A + represents at least one organic cation selected from a cation of Formula 1a, a cation of Formula 1b and a cation of Formula 1c,n n n R 22 represents a C1-C30 hydrocarbon group or the like,n n n Q 3 and Q 4 each independently represent a fluorine atom and the like,n n n A ' + represents an organic cation of the formula (2a).n n n Formula 1an n n n n n n n Formula 1bn n n n n n n n Formula 1cn n n n n n n n Formula 2an n n n n n n n In Chemical Formula 1a, Chemical Formula 1b, Chemical Formula 1c, and Chemical Formula 2a,n n n P 1 , P 2 and P 3 each independently represent a C1-C30 alkyl group,n n n P 4 and P 5 each independently represent a hydrogen atom and the like,n n n P 6 and P 7 each independently represent a C1-C12 alkyl group and the like,n n n P 8 represents a hydrogen atom,n n n P 10 To P 21 each independently represent a hydrogen atom and the like,n n n B represents a sulfur atom or an oxygen atom,n n n m represents 0 or 1. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100090655-A |
| priorityDate | 2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467698474 |
Total number of triples: 23.