http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080043076-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-16 |
| filingDate | 2006-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_446455a03fa33a54df12fd48c3714a84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85754ac2cc16979ad8752c6bf77f96cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5efa6365927553b8dc7a2ba2d6fe81c6 |
| publicationDate | 2008-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080043076-A |
| titleOfInvention | Composition for removing resist and dry etch residue and method for removing resist and dry etch residue using same |
| abstract | The present invention relates to a composition for removing resist and dry etching residues comprising a phosphate ester and (poly) ammonium phosphate salt and a method for removing resist and dry etching residues using the same.n n n The present invention is suitable for the removal of resist or dry etching residues that are denatured or cured by harsh conditions such as dry etching in the process of manufacturing a substrate for a flat panel display (FPD) to which a fine pattern is applied for high resolution. Provided are a composition for removing a resist and a dry etch residue having an excellent corrosion protection effect of a metal wiring formed on a phase, and a method for removing a resist and a dry etch residue using the same. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160074946-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140044479-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101169332-B1 |
| priorityDate | 2006-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 235.