| abstract |
Silicon oxides and electrically conductive doped silicon materials are fused in a protective gas atmosphere to produce SiO 2 : Si composites that exhibit the properties of SiO 2 and nevertheless, due to the presence of Si. Such composites can be used as targets in DC sputtering processes and / or AC sputtering processes to produce conductive silicon oxide thin films for applications such as touch screens. n n Sputtering, Target, Thin Film, Theoretical Density, Sintering |