| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d4914041481b14c69ec0c4b48e9e372 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-705
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0643
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 |
| filingDate |
2006-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_549d5922240c91ec9ca136737f177c38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e7b6e40b2f8893f5221114379c6322b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab3763f833b2d0dbe612d56cd62bc145 |
| publicationDate |
2008-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080039453-A |
| titleOfInvention |
Control of individual vias formed during energy monitoring or laser micromachining |
| abstract |
The method and system increase the quality of the results achieved by the laser micromachining system. Data 158 and 178 regarding the parameters controlling the laser micromachining process 152 are recorded during the micromachining process and identified and stored in the system by the shape associated with the parameters used to micromachin. The stored data can be retrieved during the micromachining process to enable real time control or after processing the workpiece 174 to perform statistical process control. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101035199-B1 |
| priorityDate |
2005-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |