Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_730848fc69ca7afca2b3c3e10b6cfd92 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D175-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-6674 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-3853 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-38 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D175-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
filingDate |
2006-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1da9cd479d513108dbf1461de4c0dcc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0287175216b541dd1ba09e84de65a482 |
publicationDate |
2008-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20080039408-A |
titleOfInvention |
Novel Organic Bottom Antireflective Polymer Compositions |
abstract |
The present invention relates to bottom antireflective coating compositions, polymers useful in the preparation of such compositions, and their use in image processing by forming a thin layer between a reflective substrate and a photoresist coating. |
priorityDate |
2005-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |