| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2006-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c778329cca29f828c000ddb09cfcec4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_255127c4b7348e8330078f480921fdf9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d641c8b41ddb2afd7f0790a6ecea5515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cc5e3b54b5d1b4461ea117b8cc68cbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15ca9b722321214e826166309f483b02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a24a7e37796da5eba50c074fa1d78bb |
| publicationDate |
2008-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080033595-A |
| titleOfInvention |
Method for producing cerium oxide powder for CPM slurry and method for producing slurry composition for CPM using the same |
| abstract |
The present invention relates to a method for producing a cerium oxide powder for CMP slurry and a method for producing a slurry for CMP using the same, and in particular, after preparing a cerium precursor, the cerium precursor is decomposed and calcined to increase the specific surface area of the powder. The method for producing cerium oxide powder for CMP slurry can reduce the polishing time by reducing the physical strength of the powder by increasing the chemical contact area between the polished film and the abrasive by controlling the pore distribution. And it relates to a method for producing a slurry for CMP using the same. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101715932-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102155222-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101967234-A |
| priorityDate |
2006-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |