| abstract |
The present invention forms a metal oxide layer containing a first metal element having a predetermined film thickness on the surface of a substrate, and reacts a solution containing ions of a second metal to the first metal oxide layer to react the first and second metals. It is obtained by forming a composite oxide film containing an element. A high specific dielectric constant composite oxide film capable of arbitrarily controlled film thickness without the use of complex and large-scale equipment and a method of manufacturing the same. A dielectric material and a piezoelectric material including the composite oxide film, a capacitor including the material, a piezoelectric element, and an electronic device including the element are provided.n n n Composite oxide film, dielectric material, piezoelectric material, capacitor, piezoelectric element, electronics |