| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
2006-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ac59bc4b1a0b212a2a013a5cfdf50d0 |
| publicationDate |
2008-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080027258-A |
| titleOfInvention |
Removal of Polar Fluids from Surfaces Using Supercritical Fluids |
| abstract |
A method for removing polar fluid from the surface of a substrate using a supercritical fluid is described. Substrates that can be cleaned include microelectronic devices such as integrated circuits, microelectromechanical devices, and photoelectric devices. The surface of this device may comprise a foamed polymer as used as an insulating material. Supercritical fluids useful for the removal of polar fluids generally include oxygen-containing organic compounds in a supercritical state. Removal of polar fluids using a supercritical fluid may be assisted by other cleaning methods that use a supercritical fluid to remove particulate matter from the surface of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210114429-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101406132-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9611149-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015026181-A1 |
| priorityDate |
2005-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |