| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f50f95c17e4934fb9f9810574cdf87aa |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate |
2007-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0366df05e05b6e8cc75b85f9a048c8dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abb50df5b1b074e90f9ef54999c26fe0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0581d8b4b03f8a9f892c5974818e0b90 |
| publicationDate |
2008-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080026069-A |
| titleOfInvention |
How to Clean the Ultraviolet Irradiation Chamber |
| abstract |
The present invention comprises the steps of (i) irradiating the substrate with UV light passing through the light transmission window of the UV irradiation chamber, generating radical species of the cleaning gas on the outside of the chamber; And (ii) injecting the radical species generated outside the UV irradiation chamber into the UV irradiation chamber, thereby cleaning the floodlight window. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013162848-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8657961-B2 |
| priorityDate |
2006-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |