http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080024535-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_16d7f610531dbae77bcb2e95d91a071b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-00 |
| filingDate | 2006-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f67a73a20f9b7c3458639b3439f7845 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff773e2bda15895815cac47aa44e0dbd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30db71555952285942cf2cae187503c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c71cdef795c4bad18733a95f068b2d2b |
| publicationDate | 2008-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080024535-A |
| titleOfInvention | LPEP light source driven laser system |
| abstract | A drive laser to generate a drive laser beam; A first path of a driving laser beam having a first axis; A drive laser redirecting mechanism for transitioning the drive laser beam from the first path to a second path with a second axis; An EUV collector optical element with a centrally located aperture; And a laser producing plasma EUV system in the second path, the focusing mirror positioned in the aperture and focusing the driving laser beam to a plasma start position located along the second axis. The apparatus and method may include a drive laser beam generated by a drive laser having a wavelength that allows focusing on an EUV target drop of less than approximately 100 μm at effective plasma generation energy, if not practical due to the constraints of the geometry involved in using the focusing lens. Can be. The drive laser may comprise a CO 2 laser. The drive laser redirecting mechanism may comprise a mirror. |
| priorityDate | 2005-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.