http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080016606-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-64 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38020f362c93cf00d8df1564d435442c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_295ce4d408d047d8870b5c71b6eeea36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efd630af602166478ebd1e4dd9f5da6a |
| publicationDate | 2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080016606-A |
| titleOfInvention | Method for producing a polishing composition |
| abstract | [PROBLEMS] To provide a method for obtaining a polishing composition having a high polishing rate and low surface defects on the polishing surface.n n n In the manufacturing method of the polishing composition containing a zirconium oxide sol,n n n D50 of the zirconium compound particles when the slurry of the zirconium compound is measured by a laser diffraction method (wherein d50 represents a particle diameter indicating that the number of particles below the particle diameter is 50% of the total particle number). 400-1000 degreeC of this zirconium compound which is 25 micrometers, and d99 of a zirconium compound particle (where d99 represents the particle diameter which means that the number of particle | grains below this particle diameter is 99% of all particle numbers) is 60 micrometers or less. Firing in the temperature range ofn n n Step of wet grinding the obtained zirconium oxide powder in an aqueous medium until the d50 of the zirconium oxide particles is 80 to 150 nm and the d99 of the zirconium oxide particles is 150 to 500 nm when the zirconium oxide slurry is measured by laser diffraction. It is made of a method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101868657-B1 |
| priorityDate | 2005-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 139.