http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080013963-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2006-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f3d13dbe4c2e6629636ae19d965cbe6 |
| publicationDate | 2008-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080013963-A |
| titleOfInvention | Radiation sensitive resin composition, laminated body, and its manufacturing method |
| abstract | A radiation-sensitive resin composition comprising 10 to 60 parts by weight of an alkoxysilane compound with respect to 100 parts by weight of a cyclic olefin polymer, a radiation sensitive compound, and 100 parts by weight of the cyclic olefin polymer, and a resin film composed of the composition are laminated on a substrate. The manufacturing method of the laminated body which has a process of forming a laminated body and a resin film on a board | substrate using this composition. The resin film which consists of a radiation sensitive resin composition which is excellent in the heat-resisting shape retention property of the obtained resin film at the time of melt flow at the time of forming a patterned resin film, and can also be used suitably also as a resist material, and a resin film which consists of this composition on a board | substrate Provided are a laminate formed by laminating on a substrate and a method of manufacturing the same. |
| priorityDate | 2005-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 447.