http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080012236-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-406 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-183 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2007-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65f1180eab61f567ccc7282a4f22a3b6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_584e28b75313e8a52525bfaadac2fe23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06bdc247272bf8871948fa94720009f4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd199a013f40f17382e5a2a0b90138ea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9dc841f3fc93ea98245ba21eabd18a03 |
| publicationDate | 2008-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080012236-A |
| titleOfInvention | How to grow gallium nitride crystals |
| abstract | The gallium nitride crystal growth method includes the steps of partially forming a mask (M) on the base substrate (U) that prevents epitaxial growth of the crystal, and using a vapor phase method on the base substrate (U) on which the mask (M) is formed. Epitaxially growing the crystals, wherein, in the epitaxially growing step, the growth rate (Vj) expressed in 占 퐉 / h and the growth temperature (T) expressed in absolute temperature are the coefficient a 1 = -4.39 × 10 5 , b 1 = 3.87 × 10 2 , a 2 = -7.36 × 10 5 , b 2 = 7.37 × 10 2 , to (a 1 / T + b 1 ) <Vj <(a 2 / T + b 2 ) Crystal growth is performed under the first growth conditions indicated. In this way, the dislocation density of the crystal is reduced. |
| priorityDate | 2006-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.