http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080012223-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C321-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C321-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C321-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C321-10 |
| filingDate | 2007-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47dfc59ffde831488f20bdcd86fb640a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcb142bcea5ae883356b016617eda596 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2db26d06c1ea9844d4820e1073ad28b9 |
| publicationDate | 2008-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080012223-A |
| titleOfInvention | Suitable salts for acid generators and chemically amplified positive resist compositions containing them |
| abstract | The present invention relates to salts of formula (1).n n n Formula 1n n n n n n n n In Formula 1 above,n n n P 1 , P 2 and P 3 are each independently a C 1 -C 30 alkyl group which may be substituted with one or more groups selected from hydroxyl groups, C 3 -C 12 cyclic hydrocarbon groups and C 1 -C 12 alkoxy groups Or a C 3 -C 30 cyclic hydrocarbon group which may be substituted with one or more groups selected from hydroxyl groups and C 1 -C 12 alkoxy groups, provided that all of P 1 , P 2 and P 3 may be substituted at the same time Cannot be a phenyl group,n n n Q 1 and Q 2 are each independently a fluorine atom or a C 1 -C 6 perfluoroalkyl group,n n n R is of the formula In which A 1 is -OH or -Y 1 -OH, n is an integer from 1 to 9, Y 1 is a monovalent C 1 -C 6 saturated aliphatic hydrocarbon group, In which ring X 1 is a -CH 2 -group substituted with -CO- and at least one hydrogen atom of the monocyclic or polycyclic hydrocarbon group is a C 1 -C 6 alkyl group, a C 1 -C 6 alkoxy group A C 3 -C 30 monocyclic or polycyclic hydrocarbon group, which may be substituted with a C 1 -C 4 perfluoroalkyl group, a C 1 -C 6 hydroxyalkyl group, a hydroxyl group or a cyano group ), The chemical formula Wherein X 2 is a hydrogen atom of the —CH 2 — group substituted with a hydroxyl group, and at least one hydrogen atom of a monocyclic or polycyclic hydrocarbon group is a C 1 -C 6 alkyl group, C 1 -C 6 C 3 -C 30 monocyclic or polycyclic hydrocarbons, which may be substituted with alkoxy groups, C 1 -C 4 perfluoroalkyl groups, C 1 -C 6 hydroxyalkyl groups, hydroxyl groups or cyano groups Group) Wherein X 3 is substituted with one -CH 2 -group with -COO-, and at least one hydrogen atom of the monocyclic or polycyclic hydrocarbon group is a C 1 -C 6 alkyl group, C 1 -C 6 C 3 -C 30 monocyclic or polycyclic hydrocarbons, which may be substituted with alkoxy groups, C 1 -C 4 perfluoroalkyl groups, C 1 -C 6 hydroxyalkyl groups, hydroxyl groups or cyano groups Group, m is an integer from 0 to 12) or Wherein X 4 has 3 or more cycles and at least one hydrogen atom of the polycyclic hydrocarbon group is a C 1 -C 6 alkyl group, a C 1 -C 6 alkoxy group, a C 1 -C 4 perfluoroalkyl group C 6 -C 30 , which may be substituted with a C 1 -C 6 hydroxyalkyl group or a cyano group Polycyclic hydrocarbon group, l is an integer from 1 to 12).n n n The present invention further relates to a chemically amplified resist composition comprising the salt of formula (I) as mentioned above. |
| priorityDate | 2006-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.