http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080012131-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67201 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67769 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2007-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6465d5c8448e582221195a83ccd350f6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_117319d9441ca022455ce9347c2ae551 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2239fab2cad0317c83cdc5a6f3d4bdba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_786a3d48aff89e7d8d2b6200f9d53bb8 |
| publicationDate | 2008-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080012131-A |
| titleOfInvention | Method of evacuating intermediate conveyance chamber, substrate processing system, and intermediate conveyance chamber |
| abstract | The subject of this invention is providing the intermediate conveyance chamber which can prevent the defect of a board | substrate. The substrate processing system 1 includes a process module 2 that performs a plasma treatment on the wafer W, an atmospheric transfer device 3 that takes out the wafer W from the hoop 5, and a wafer W. The load lock module 4 as an intermediate | middle conveyance chamber which carries in and out is provided. The load lock module 4 includes a chamber 71 having a plate-like member 90 disposed opposite the wafer mounting surface of the pick 74 of the transfer arm 70 and disposed at the same time. And a gas supply system 72 for supplying gas into the chamber 71 and an LL / M exhaust system 73 for exhausting the inside of the chamber 71. |
| priorityDate | 2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.