| abstract |
A fluid storage and dispensing system, and a method for supplying fluid for use thereof. Various configurations of fluid storage and dispensing systems include substitutions for fluid storage and dispensing vessels containing physical adsorbents and internal regulator mounted fluid storage and dispensing vessels. The system and method is applicable to a wide range of end uses, and enhances the storage and distribution of hazardous fluids. In certain end uses, the reactant gas is dispensed from a large, stationary, arranged fluid storage and distribution vessel containing a physical adsorbent to the gas at sub-atmospheric pressure to the semiconductor manufacturing facility, as described herein. Refill from a safe gas source of refill gas. |