| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4b5184b7a8fe02a0c2cc4e509230214 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00 |
| filingDate |
2006-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7172857242c98238f0f8839b9dcca5cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c40e00d0ae3243bf06cc38410619597
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07ee7d73ba3c250c7727756db3c9e0c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_280ddd6648555158736811324b2ba762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6f94f8478b78186847c998f7a99b990 |
| publicationDate |
2008-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080009489-A |
| titleOfInvention |
CPM polishing pad comprising a liquid organic core surrounded by a polymer shell and a method of manufacturing the same |
| abstract |
The present invention relates to a chemical mechanical polishing pad, and more particularly, includes a core of a polymer shell surrounding a liquid organic material having a boiling point of 130 ° C. or higher in a polymer matrix, and has pores opened by the core on a polishing surface. Provided are a CMP polishing pad and a method for producing the pad.n n n The polishing pad of the present invention has high hardness and high density, can maximize polishing efficiency and wafer flatness, and can maintain a constant core size even during urethane reaction, and thus have high polishing efficiency and stable polishing performance. The pads can be produced. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170020446-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017175894-A1 |
| priorityDate |
2006-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |