http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080007820-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_799858790a0d932d2bf525d1f2324ad6 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48 |
| filingDate | 2006-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62c144c136a0699c9df6862c336c8afb |
| publicationDate | 2008-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080007820-A |
| titleOfInvention | Rotary deposition source for thin film deposition and thin film deposition apparatus using the same |
| abstract | Provided are a rotary deposition source for thin film deposition and a thin film deposition apparatus using the same.n n n The rotary deposition source according to an embodiment of the present invention, the upper surface is open, the deposition source including a crucible containing a deposition material therein and a heating unit for heating the crucible, the deposition source using a constant power supplied from the outside It includes a constant rotation means for rotating the.n n n A thin film deposition apparatus using a rotary deposition source according to an embodiment of the present invention masks the substrate to be deposited, the mask is coupled to the substrate to deposit only the necessary portion of the substrate, the portion that does not need to be deposited, the And a deposition source rotated by using a substrate chucking system supporting a substrate and the mask and a predetermined rotating means, the deposition source having an open top surface, a crucible containing a deposition material therein, and a heating unit for heating the crucible. Include. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160001887-A |
| priorityDate | 2006-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.