| abstract |
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an etching solution for a liquid crystal display device. In particular, a gate electrode composed of a double layer of molybdenum and aluminum alloy (Mo / AlNd), a source / drain electrode composed of molybdenum (Mo), and a pixel electrode composed of ITO For etching using a solution.n n n The present invention is composed of 40 ~ 70wt% phosphoric acid, 2 ~ 15wt% nitric acid, 4 ~ 35wt% acetic acid as a main component of 0.05 ~ 5wt% chlorine compound, 0.05 ~ 5wt% chlorine stabilizer, 0.05 ~ 5wt% lithium It comprises a compound, an additive containing a sulfur salt compound of 0.05 ~ 5wt% and an etching solution containing a residual amount of water.n n n As a result, by using a single etchant in each mask process as a single etchant, productivity and material cost are reduced. |