http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070106143-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d12f09e2e9797cb2f098f10afcf35c05 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2867 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2006-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26a42e2cbf6379c1e9530c4423acee2f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c404a1714778cae223dab2ab9e373281 |
| publicationDate | 2007-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070106143-A |
| titleOfInvention | Chiller of Semiconductor Device Test Handler |
| abstract | The present invention relates to a cooling device for a semiconductor device test handler, and to cool a semiconductor device quickly by minimizing frost generation by cooling the semiconductor device to a predetermined temperature state by a heat conduction method rather than a tropical flow method.n n n The present invention for this purpose is a chamber into which a test tray equipped with a semiconductor element is inserted; An internal heat exchanger installed inside the chamber and having a refrigerant pipe through which a refrigerant flows, the internal heat exchanger being in contact with the test tray to perform heat exchange by heat transfer; An external heat exchanger having a refrigerant pipe connected to a refrigerant pipe of the internal heat exchanger outside the chamber to form a circulation passage, and performing heat exchange with a cooling fluid supplied from the outside; It provides a cooling device for a semiconductor device test handler including a pumping unit for pumping the refrigerant from the external heat exchanger to the internal heat exchanger and causing a circulation flow of the refrigerant through the refrigerant pipe. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101469091-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101479231-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102124130-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100949134-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100981165-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101469092-B1 |
| priorityDate | 2006-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 |
Total number of triples: 23.