| abstract |
An yttrium oxide composition comprising yttrium oxide particles having a size of 25 nm or less, a method for preparing the same, and a method for forming an yttrium oxide film using the same are disclosed. A yttrium salt solution is prepared and a yttrium oxide composition is prepared by adding a basic compound to the yttrium salt solution to adjust the pH value to 3.7 to 7. The yttrium oxide composition has a particle size of 25 nm or less and has a uniform particle distribution, thereby forming an yttrium oxide film having improved properties. |