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filingDate 2007-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2007-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20070104870-A
titleOfInvention Conductive abrasive parts for electrochemical mechanical polishing
abstract Embodiments for a ball assembly are provided. In one embodiment, the ball assembly includes a housing, a ball, a conductive adapter and a contact member. The housing includes an annular seat extending into the first end of the inner passageway. This conductive adapter is coupled to the second end of the housing. This contact member electrically couples the adapter and the ball, which is held in a housing between the seat and the adapter.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170018359-A
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priorityDate 2002-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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