| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-137 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10 |
| filingDate |
2007-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_918fa77202a97c9fcc5c2e106e9800f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e56042125c8b1c08ef0d5ceba5a6e97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1985a0897cf38ca28dccddae6a8fbcad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e0feac8876029d5c6a75b2ffc21b1ae |
| publicationDate |
2007-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20070104255-A |
| titleOfInvention |
Conductive Plasma Member |
| abstract |
The present invention is a plasma member exposed to a halogen-based gas plasma atmosphere, wherein a thermal sprayed film of yttrium metal or a thermal sprayed film of yttrium metal and yttrium oxide and / or yttrium fluoride is formed on at least a portion of the substrate exposed to the plasma. The electroconductive plasma member provided with electroconductivity is provided.n n n The corrosion resistant conductive plasma member of the present invention is conductive and improves corrosion resistance to a halogen-based corrosive gas or plasma thereof, and suppresses particle contamination by plasma etching when used in a semiconductor manufacturing apparatus or a flat panel display manufacturing apparatus. can do.n n n Conductive plasma resistant member, halogen-based corrosive gas, flat panel display |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180132949-A |
| priorityDate |
2006-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |