abstract |
Multi-photon reactive compositions include ethylenically unsaturated liquid polysilazane precursors, multifunctional thiol additives, multi-ethylene-unsaturated additives different from polysilazane and multi-photon photocuring compositions. The present invention provides ceramic substrate microstructures such as heat resistant materials including, for example, microburners, micro heat exchangers, sensor and actuator systems, microfluidic devices, and micro-optical systems that can be used independently or integrated into other systems. It can be used to |