| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2005-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29407907a39a844a28ecb90f4f3aa9f9 |
| publicationDate |
2007-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20070088571-A |
| titleOfInvention |
Positive resist composition and method of forming resist pattern |
| abstract |
In the positive type resist composition containing the resin component (A) and the acid generator component (B), the component (A) is represented by a structural unit represented by the following general formula (a0) (a0),n n n (a1) Positive resist composition containing the high molecular compound (A1) which has a unit which does not correspond to a structural unit (a0) as a structural unit derived from ((alpha) -lower alkyl) acrylic acid ester which has an acid dissociable, dissolution inhibiting group.n n n n n n n n (R is a hydrogen atom or a lower alkyl group; Y 1 is an aliphatic cyclic group; Z represents an alkoxyalkyl group; a represents an integer of 1 to 3, b represents an integer of 0 or 1 to 2, and a + b = 1 to 3) to be.) |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10126653-B2 |
| priorityDate |
2004-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |