http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070085946-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate | 2005-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d0aa19cf9903e7d40d59e024e93ea6d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74ccb0922b5d5c81a9ed971a9cbcd735 |
| publicationDate | 2007-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070085946-A |
| titleOfInvention | Encapsulated wafer processing apparatus and manufacturing method thereof |
| abstract | The present invention relates to a wafer processing apparatus for use as an electrostatic chuck (ESC) comprising a graphite substrate and at least one electrode pattern in a semiconductor wafer processing apparatus, wherein the grooves of the electrode pattern are B, Al, Si, Ga, refractory hard metal. And an insulating or semiconducting material selected from the group consisting of transition metals and rare earth metals, or complexes and / or combinations thereof, and form a substantially planar surface. The substantially planar surface is then nitride, carbide, carbonitride or oxynitride of an element selected from the group consisting of B, Al, Si, Ga, refractory hard metals, transition metals and rare earth metals, or complexes thereof and / or Coated with one or more semiconductor layers comprising one or more of the combinations. |
| priorityDate | 2004-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.