abstract |
The present invention provides a method for producing a self-assembled multilayer molecular film, comprising repeatedly performing the following steps:n n n (1) forming a TiO 2 layer on the surface of SiO 2 by using atomic layer deposition;n n n (2) preparing a self-assembled monomolecular film on the surface by vapor-phase reaction of a surfactant, organosilicon, organosulfur or organophosphate molecule using molecular layer deposition on the layer,n n n (3) activating the functional group of the alkane chain of the self-assembled monomolecular film with -OH or -COOH by using UV / O 3 or O 3 in the formed self-assembled monomolecular film, andn n n (4) depositing TiO 2 on the activated self-assembled monolayer by using atomic layer deposition. |