| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49995 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 |
| filingDate |
2005-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8d11054647ebf2550451eab5cddc342 |
| publicationDate |
2007-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20070083779-A |
| titleOfInvention |
Baffle Plate Assembly and Manufacturing Method Thereof |
| abstract |
Apparatuses relating to an apparatus relating to a plasma chamber used to process a semiconductor substrate, in particular to an improvement in pumping a baffle plate used for a plasma source, are disclosed. Also disclosed is an apparatus and method for manufacturing a baffle plate assembly wherein various pumping portions are formed in the baffle plate blank and are formed from modified baffle plate blanks that are opened in a planar material removal operation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101408790-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10103018-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10796933-B2 |
| priorityDate |
2004-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |