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publicationDate 2007-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20070069036-A
titleOfInvention Semiconductor laser device and manufacturing method thereof
abstract The nitride semiconductor laser device element 20 includes a nitride semiconductor laser device 5 having a dielectric layer 5b made of SiO 2 formed on the light exit surface 5a, and the nitride semiconductor laser device 5 is hermetically sealed. The package part 1 is provided. In addition, the atmosphere in the package part 1 is an oxygen containing atmosphere with a moisture concentration of 5000 ppm or less and an oxygen concentration of 5% or more. By adjusting the atmosphere in the package part 1, the fall of the output and the fall of reliability resulting from the alteration of the dielectric layer which consists of oxides formed in the end surface of the semiconductor laser element can be suppressed.
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