http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070056939-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2006-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5de06956623e54a2cbd0609a30005957 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5381d1dc538ec775bc1d20c5f4e43cf3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b8769864183c88448babda45650d1e |
| publicationDate | 2007-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070056939-A |
| titleOfInvention | Solvent recovery system |
| abstract | Provided is a system in which a solvent can be efficiently recovered from a coated coating liquid and reused.n n n In order from the upstream side, the board | substrate input part 1, the coating apparatus 2, and the pressure reduction drying apparatus 3 are arrange | positioned by the conveyance line, and the exhaust piping 31 is led from the pressure reduction drying apparatus 3, The vacuum pump 32 is provided in this piping 31, and the liquefaction trap 4 is arrange | positioned downstream of this vacuum pump 32, and the solvent recovery piping 5 from the said liquefaction trap 4 is carried out. The pipe 5 is provided with a liquid feed pump 6, and a dewatering device 7 and a filter 8 are disposed downstream of the liquid feed pump 6 to liquefy in the liquefaction trap 4. The used solvent is sent to the buffer tank 9 by the liquid feed pump 6. The solvent accumulated in the buffer tank 9 is provided for cleaning the priming roller 22. |
| priorityDate | 2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.