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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ee24b7a029a18161ea8953de3bd055a
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publicationDate 2007-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20070055578-A
titleOfInvention Micromachine devices
abstract The micromachine device includes a pad 107a and a pad 107b made of polysilicon doped with impurities.n n n n Micromachined device, thin film processing, electrode structure, impurity doped polysilicon, suppression of parasitic capacitance
priorityDate 2004-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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