| abstract |
The method of polishing the workpiece W can reduce the polishing cost, can polish the surface of the workpiece W with high polishing precision, and can easily process the used polishing liquid and cleaning liquid. The method comprises the steps of: pressing a workpiece (W) onto an abrasive member (12); Supplying a polishing liquid; And moving the workpiece W relative to the polishing member 12. Electrolytic reduced water produced by electrolysis is used as the polishing liquid.n n n n Electrolysis, Reduced Water, Polishing Equipment |