http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070034968-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2006-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070034968-A |
| titleOfInvention | Aqueous polishing liquid and chemical mechanical polishing method |
| abstract | SUMMARY OF THE INVENTION An object of the present invention is to provide an aqueous polishing liquid having a rapid CMP speed and less dishing, and a chemical mechanical polishing method using the aqueous polishing liquid in the manufacture of semiconductor devices such as IC chips and LSIs.n n n An aqueous polishing liquid comprising an oxidizing agent, a 5-membered monocyclic compound having three or more nitrogen atoms, or a compound in which a heterocycle is condensed to the compound, and a compound having an imidazole skeleton or an isothiazolin-3-one skeleton And performing a relative movement in the presence of the aqueous polishing liquid and polishing the polishing surface in contact with the polishing surface. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110076927-A |
| priorityDate | 2005-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 308.