| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2006-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c79f80fb618aabb188cc7941256c6f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9fbb3868b832970980028799f9e6ec2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92e7710475420c56168894017da09be8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa74b5f6e967da296c5b6b54875d8016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c100cabc0dd317414698dbb0e4efdabb |
| publicationDate |
2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20070026104-A |
| titleOfInvention |
Antireflective hard mask compositions |
| abstract |
The present invention includes novel organic-containing compositions that can act as antireflective layers for overcoated photoresist. The composition of the present invention can also effectively act as a hard mask layer by exhibiting sufficient plasma etch selectivity from the underlying coating layer. Preferred compositions of the present invention have a high Si content and include different resin blends. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180064287-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150069557-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109564388-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109564388-B |
| priorityDate |
2005-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |