| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B111-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-505 |
| filingDate |
2006-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20070021938-A |
| titleOfInvention |
Manufacturing method of yttrium sintered compact, electrostatic chuck and yttrium sintered compact |
| abstract |
An object of the present invention is to provide a yttrium sintered compact having excellent corrosion resistance and mechanical strength and having a volume resistivity adjusted.n n n The yttrium sintered compact contains 5 to 40% by volume of silicon carbide and has a volume resistivity in the range of 1 × 10 1 to 1 × 10 17 Ω · cm at room temperature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102290498-B1 |
| priorityDate |
2005-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |