http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070011129-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2006-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23d8b0433ce2421a9da75a2be7b4cce4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6197d7845f766fdbcb7b7029f0e635fd |
| publicationDate | 2007-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070011129-A |
| titleOfInvention | Resist composition |
| abstract | The present invention not only improves the solubility in producing a resist and resist film adhesion in developing, but also improves resist stability and provides a resist composition excellent in safety.n n n In addition, the present invention provides a resist composition comprising a resist composition and an organic solvent, the organic solvent (a1) C 3 -6 alkanediols, (a2) an alkoxy mono- -C 3 -6 alkanediols, (b1) C 5 - 6 alkanediol mono acetate, (b2) a mono-alkoxy -C 3-6 alkane diol monoacetate, (c1) C 5 -6 alkane diol diacetate and (c2) a mono-alkoxy the group consisting of -C 3-6 alkane diol diacetate It provides a resist composition which is at least one solvent selected from. |
| priorityDate | 2005-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 244.