| abstract |
The present invention achieves a stable connection even in a circuit device having a fine and fine pitch electrode, achieves high durability without the electrode structure falling off from the insulating film, and a circuit device with a small pitch of the wafer or the inspected electrode. On the other hand, the sheet-like probe which reliably prevents positional shift of an electrode structure and a test | inspection electrode by a temperature change in a burn-in test, and maintains a favorable connection state is provided, and its manufacturing method.n n n The sheet-like probe of this invention is equipped with the insulating layer which has a some electrode structure extended in the thickness direction, and the metal frame board which supports this, The electrode structure is a surface electrode part which protrudes from the surface of an insulating layer, and an insulating layer The back electrode portion exposed to the back surface of the substrate and extends in the thickness direction of the insulating layer continuously from the base end of the surface electrode portion, and is connected to the outer side along the surface of the insulating layer continuously from the short circuit portion connected to the back electrode portion and the base end portion of the surface electrode portion. It is made by a holding portion that extends, the manufacturing method of the present invention is characterized in that the surface electrode portion and the short circuit portion to fill the metal separately.n n n n Sheet Probes, Probe Cards, Anisotropic Conductive Connectors, Inspection Circuit Boards |