http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070003060-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate | 2005-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6802e4f106773691135b64ee69c69d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23b49665e991ff891fece856a286b979 |
| publicationDate | 2007-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070003060-A |
| titleOfInvention | Trench isolation film formation method of semiconductor device |
| abstract | The method of forming a trench isolation layer of a semiconductor device according to the present invention includes forming a pad oxide film and a nitride film pattern sequentially on a semiconductor substrate, and sequentially etching the nitride film pattern and the pad oxide film to form a relatively narrow first width and a relatively wide second width. Forming a device isolation trench, a thermal oxidation process to form a thermal oxide film inside the device isolation trench, and sequentially forming a liner nitride film and a liner oxide film on the entire surface of the thermal oxide film formed product; And removing the liner oxide film, the liner nitride film, and the thermal oxide film formed on the bottom surface of the device isolation trench having a second width, exposing the semiconductor substrate through the bottom surface of the device isolation trench, and filling the buried oxide film inside the device isolation trench. Forming a device isolation film. |
| priorityDate | 2005-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.