| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45591 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2005-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7533c5e9fb318563300c7a672f448980
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5163e6bc4f7da43b6ce7532d2520c38b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d28ab62376b14a58be147657555aa33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f78c91a41ced360739943f2fe994806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98ccc871fc79697eb6ec60338404e0a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a6051dadc353244e914d40f58d95778 |
| publicationDate |
2007-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20070001340-A |
| titleOfInvention |
Chamber insert and substrate processing apparatus including the same |
| abstract |
A chamber insert for adjusting gas flow in the chamber and a substrate processing apparatus having the same have a hollow cylindrical body portion which is opened upside down to surround the stage on the side of the stage for supporting the substrate on the upper surface. The first projection extends along the lower end of the body portion in the outer direction of the body portion and the second projection extends from the upper end portion of the body portion in the outer direction of the body portion. |
| priorityDate |
2005-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |