| abstract |
The present invention relates to a transparent conductive film used for solar cells or display devices, an oxide sintered body for producing the transparent conductive film, and a method of manufacturing the same.n n n Tungsten was dissolved in order to obtain an oxide sintered body that does not crack or crack even when a large amount of electron beams are put into the oxide transparent conductive film by vacuum deposition such as electron beam deposition, ion fritting, or high density plasma assist deposition. Indium oxide containing indium oxide, tungsten containing 0.001 or more and 0.034 or less in atomic ratio to indium, and having a density of 4.0 g / cm 3 or more and 6.5 g / cm 3 or less, or indium oxide in which tungsten and zinc are dissolved Tungsten contains 0.001 or more and 0.034 or less in atomic ratio to indium, zinc contains 0.00018 or more and 0.017 or less in atomic ratio to indium, and has a density of 4.0 g / cm 3 or more and 6.5 g / cm 3 or less An oxide sintered compact, an oxide transparent conductive film, and a manufacturing method thereof are used. |