| abstract |
To prevent contamination of the raw material gas due to the gas production equipment handling the raw material gas and the gas supply container. The surface roughness of the gas contact surface in the highly reactive raw material gas, especially the gas production facility and supply container by fluorinated hydrocarbon, shall be 1 micrometer or less in a center average roughness Ra. It is preferable that an oxidative passivation film such as chromium oxide, aluminum oxide, yttrium oxide, magnesium oxide or the like is formed on the gas contact surface whose surface roughness is controlled. |