http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060092890-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80b0dcf72b385299ab810c5115a99168 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-112 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-047 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00944 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-001 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-21 |
| filingDate | 2005-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49f3240a8d5610fdea20d79620b94899 |
| publicationDate | 2006-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060092890-A |
| titleOfInvention | System and method for providing regenerative protective coating in micro-electric system equipment |
| abstract | In various embodiments of the present invention, a regenerative protective coating is formed on one or more surfaces of the interior cavity of the MEMS device 80. In a particular embodiment, a regenerative protective coating 170 is provided on one or more mirror surfaces of the interfering light modulation device, also known as iMoD. The protective coating can be regenerated by adding heat or energy to the protective coating.n n n n MEMS, regenerative protective coating |
| priorityDate | 2004-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.