| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 |
| filingDate |
2004-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1573f9f8e810d85fbd182b51a2bc5cef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_958f261f1e4b239d1b41a9bfea7b9aa7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5b34f13da3c0dbfebbe1619ae8669c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_810fb334b8c40c1f63b66be48fbac307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b289eaf101a7e3efed3d5e52a5afb898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a72d24523edb17658658d139fb27b100
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31a95a6674d0f44bbff33af022c3012f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_362794ae301d2af12f00b8cce3905ae8 |
| publicationDate |
2006-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060088480-A |
| titleOfInvention |
Photoresist Polymer Composition |
| abstract |
The present invention relates to the production of photoresist polymers via living free radical polymerization. A steric bulk ester monomer is used as the polymerization component. The use of chain transfer agents is included in the polymerization processing conditions. Described herein is the decomposition of polymer end groups comprising heteroatoms. |
| priorityDate |
2003-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |