http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060087552-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate | 2004-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2cef20f850b37b4605c6c73e5f74a4d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_128753686ca9827c5bf93a29a5dbcba8 |
| publicationDate | 2006-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060087552-A |
| titleOfInvention | Chemical-mechanical polishing composition and method of using same |
| abstract | The present invention is selected from the group consisting of (a) silica particles, (b) from about 5 x 10 -3 to about 10 mmol / kg, calcium, strontium, barium and mixtures thereof, based on the total weight of the polishing composition. A chemical-mechanical polishing composition comprising a liquid carrier comprising at least one alkaline earth metal, (c) about 0.1 to about 15 weight percent oxidant, and (d) water. The invention also provides a polishing composition comprising about 5 × 10 −3 to about 10 mmol / kg of at least one alkaline earth metal selected from the group consisting of calcium, strontium and mixtures thereof, and optionally comprising an oxidizing agent. . The present invention also provides a method for polishing a substrate using the above-mentioned polishing composition. |
| priorityDate | 2003-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 134.