| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ad96a7dcc49390e878c49a36a7b3178 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2005-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15438faf3853a2849fcf2ab4b635dd64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f5f8ac1b3c3e4b463696ec7eaedfd10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8584e72710d395f742c206ad17993981
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fe5fa142241f640e2e698c9a905dc1c |
| publicationDate |
2006-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060082623-A |
| titleOfInvention |
Thin film deposition method using ECDTMD |
| abstract |
The present invention provides a substrate mounting step (S1) for mounting a substrate on the susceptor in the reactor chamber 11, the first and second reactants are introduced to deposit a thin film containing Ti element on the substrate, and the substrate A thin film deposition step (S2) of depositing a thin film by spraying a first reactant and a second reactant for depositing the thin film on the substrate (w), the thin film deposition step (S2), It is characterized by using ECTDMAT (Ethylcyclopentadienyltris (dimethylamino) titanium) as one reactant. |
| priorityDate |
2005-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |