| titleOfInvention |
Precursor composition, preparation method of precursor composition, inkjet coating ink, production method of ferroelectric film, piezoelectric element, semiconductor device, piezoelectric actuator, inkjet recording head, and inkjet printer |
| abstract |
The present invention provides a precursor composition for forming a ferroelectric material having good composition controllability in a liquid phase method and capable of reusing a metal component such as lead, a method for producing the precursor composition, and a method for producing a ferroelectric film using the precursor composition.n n n A precursor composition comprising a precursor for forming a ferroelectric, wherein the ferroelectric is represented by the formula AB 1 - x C x O 3 , the A element comprises at least Pb, and the B element is Zr, Ti, V, W and Hf And at least one of N, and at least one of Nb and Ta, wherein the precursor comprises at least the B and C elements, and also has an ester bond in some, and the precursor is dissolved in an organic solvent or The organic solvent is dispersed and includes at least a first alcohol and a second alcohol having a higher boiling point and higher viscosity than the first alcohol.n n n n Ferroelectric, precursor composition, inkjet printer, alcohol |