| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53216ef9600af9d3d516410cf2192856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3c7c595b6b5e56112655b933f65c10c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b3b5e3598db0e85f9f920284b232257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dbb342af1334bbbf9c853532f72eecf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fbdb466adc4fe0a4ea3b22e3389ff50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea963f67f7104acfbb2602f61515787a |
| publicationDate |
2006-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060073231-A |
| titleOfInvention |
Manufacturing method of semiconductor device |
| abstract |
According to an aspect of the present invention, there is provided a method including: (1) forming a gate in a cell region in a substrate in which a cell region and a peripheral circuit region are divided; (2) depositing an oxide film, a nitride film spacer, and an oxide film spacer on the entire surface of the product of step (1); (3) forming a photoresist pattern which opens the cell region by applying photoresist on the resultant of step (2), exposing and developing; (4) hard baking and shrinking the photoresist pattern; (5) A method of manufacturing a semiconductor device comprising the step of removing the residue of the photoresist pattern remaining in the cell region with oxygen plasma. n n n n Semiconductor device, word line |
| priorityDate |
2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |