| abstract |
The compound of the present invention is represented by the following formula (1):n n n n n n n n In formula, R < 1> , R < 2> , R < 4> , R < 5> , m0-m <2> and n0-n <2> are the same as what was described in specification. A radiation sensitive composition containing the compound of formula 1 as a main component of a solid component is excellent in sensitivity, resolution, heat resistance, etching resistance and solubility in a solvent. |